Test method of microstructure body and micromachine
AssigneeSemiconductor Energy Laboratory Co., Ltd.
InventorsMayumi Yamaguchi, Konami Izumi, Fuminori Tateishi
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Abstract
It is an object to provide a test method of a process, an electric characteristic, and a mechanical characteristic of a structure body in a micromachine without contact. A structure body including a first conductive layer, a second conductive layer provided in parallel to the first conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer is provided; an antenna connected to the structure body is provided; electric power is supplied to the structure body wirelessly through the antenna; and an electromagnetic wave generated from the antenna is detected as a characteristic of the structure body.
Claims16
A method for testing a microstructure body, comprising the steps of:
- connecting a first antenna to a first microstructure body including a first conductive layer, a second conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer and having a known characteristic;
- connecting a second microstructure body having the same structure as that of the first microstructure body to a second antenna having the same structure as that of the first antenna;
- supplying electric power to the first microstructure body wirelessly through the first antenna;
- detecting an electromagnetic wave generated from the first antenna as a reference characteristic of the second microstructure body;
- supplying electric power to the second microstructure body wirelessly through the second antenna;
- detecting an electromagnetic wave generated from the second antenna as a characteristic of the second the microstructure body;
- and
- evaluating a characteristic of the second microstructure body by comparing the detected characteristic of the second microstructure body with the reference characteristic of the second microstructure body.
A method for testing a microstructure body, comprising the steps of:
- connecting a first antenna to a first microstructure body including a first conductive layer, a second conductive layer, and a sacrifice layer or a space provided between the first conductive layer and the second conductive layer and having a known characteristic;
- connecting a second microstructure body having the same structure as that of the first microstructure body to a second antenna having the same structure as that of the first antenna;
- supplying electric power to the first microstructure body through the first antenna;
- detecting an electromagnetic wave generated from the first antenna as a reference characteristic of the second microstructure body;
- supplying electric power to the second microstructure body through the second antenna;
- detecting an electromagnetic wave generated from the second antenna as a characteristic of the second the microstructure body;
- and
- evaluating a characteristic of the second microstructure body by comparing the detected characteristic of the second microstructure body with the reference characteristic of the second microstructure body.
Dependencies are inferred from the claim text.