Inductive getter activation for high vacuum packaging
AssigneeInnovative Micro Technology
InventorJeffery F. Summers
Life of this patent
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Abstract
An approach to activating a getter within a sealed vacuum cavity is disclosed. The approach uses inductive coupling from an external coil to a magnetically permeable material deposited in the vacuum cavity. The getter material is formed over this magnetically permeable material, and heated specifically thereby, leaving the rest of the device cavity and microdevice relatively cool. Using this inductive coupling technique, the getter material can be activated after encapsulation, and delicate structures and low temperature wafer bonding mechanisms may be used.
Claims17
A method for activating a getter, comprising:
- forming a magnetically permeable material on a first substrate;
- forming a cavity disposed in the first substrate under the magnetically permeable material, wherein the cavity is devoid of solid material under a substantial portion of a surface of the magnetically permeable material;
- forming a first layer of getter material over the magnetically permeable material;
- forming a microdevice on a surface of either the first substrate or a second substrate;
- providing a coil which is not mechanically or electrically coupled to the first substrate;
- applying an RF signal to the coil;
- heating the magnetically permeable material by inductive coupling to the coil;
- and
- heating the getter material by thermal conduction from the magnetically permeable material, to a temperature sufficient to activate a surface of the getter material for gettering.
A device, comprising:
- a magnetically permeable layer material formed on a first substrate;
- a first getter material formed over the magnetically permeable layer material;
- a microdevice formed on the first substrate or a second substrate, the microdevice being encapsulated in a first cavity defined by the first substrate and the second substrate;
- a second cavity disposed in the first substrate under the magnetically permeable layer material, wherein the second cavity is devoid of solid material under a substantial portion of a surface of the magnetically permeable layer material:
- and
- a coil which is inductively coupled to the magnetically permeable layer material, but not mechanically or electrically coupled to the first substrate or the second substrate.
Dependencies are inferred from the claim text.