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US 8,557,628 B2Granted
Method for production of zinc oxide single crystals
AssigneeFairfield Crystal Technology, LLC
InventorShaoping Wang
Life of this patent
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Abstract
The disclosed subject matter includes a method of producing zinc oxide (ZnO) single crystals in an enclosure. The ZnO single crystals have a low concentration of lithium and hydrogen impurities.
Claims19
A method for growing a zinc oxide (ZnO) single crystal boule within an interior of a physical vapor transport (PVT) furnace system, the method comprising the steps of:
- placing a ZnO source material inside a first end of an iridium metal crucible and placing a ZnO seed in a second end of the iridium metal crucible wherein the ZnO seed and a surface of the ZnO source material facing the ZnO seed are separated by a first distance;
- placing the iridium metal crucible containing the ZnO seed and the ZnO source material in a thermal insulation setup;
- heating the iridium metal crucible containing the ZnO seed and the ZnO source material to obtain a temperature distribution such that a temperature of the ZnO source material (T1), is higher than a temperature of the ZnO seed (T2), wherein T2 is a temperature in a range from about 1500° C. to about 1900° C.;
- maintaining a pressure of the interior of the PVT furnace system by flowing a gas mixture through the interior of the PVT furnace system;
- and
- maintaining the temperature distribution within the iridium metal crucible to cause growth of the ZnO single crystal boule on the ZnO seed, wherein the ZnO crystal boule comprises lithium (Li) in an atomic concentration less than about 1×1016 cm−3and hydrogen (H) in an atomic concentration less than about 1×1017 cm−3.
3 more elements
A method for growing a zinc oxide (ZnO) single crystal boule within an interior of a physical vapor transport (PVT) furnace system, the method comprising the steps of:
- placing a ZnO source material inside a first end of an iridium metal crucible and placing a ZnO seed in a second end of the iridium metal crucible wherein the ZnO seed and a surface of the ZnO source material facing the ZnO seed are separated by a first distance;
- placing the iridium metal crucible containing the ZnO seed and the ZnO source material in a thermal insulation setup;
- heating the iridium metal crucible containing the ZnO seed and the ZnO source material to obtain a temperature distribution such that a temperature of the ZnO source material (T1), is higher than a temperature of the ZnO seed (T2), wherein T2 is a temperature in a range from about 1500° C. to about 1900° C.;
- maintaining a pressure of the interior of the PVT furnace system by flowing a gas mixture through the interior of the PVT furnace system;
- and
- maintaining the temperature distribution within the iridium metal crucible to cause growth of the ZnO single crystal boule on the ZnO seed, wherein the ZnO single crystal boule has an iridium (Ir) concentration in a range of about 0.5 ppm to about 10 ppm by weight.
3 more elements
Dependencies are inferred from the claim text.