Electric-controlled operator

#This application claims priority to Chinese Patent Application No. 201110234386.9, filed Aug. 16, 2011, which is incorporated herein by reference in its entirety.

#The present invention relates to an electric-controlled operator. More particularly, the present invention relates to an electric-controlled operator for gripping and releasing objects.

#In semiconductor processing techniques, an electric-controlled operator is often used for gripping and releasing objects. For example, such an electric-controlled operator can be adapted to put an object into a process chamber, and to take out the processed object after the object has been processed in the process chamber.

#The accompanying drawings, which are incorporated in and constitute a part of the specification, illustrate embodiments of the invention and, together with the description, serve to explain the principles of the invention.

#In the drawings, the present invention is illustrated in an exemplary manner rather than a limiting manner. The present invention can be more clearly understood based on the following detailed description with reference to the accompanying drawings, in which:

#FIG. 1a is a schematic perspective view showing an electric-controlled operator of the prior art.

#Various exemplary embodiments of the present disclosure will now be described in detail with reference to the drawings. It should be noted that the relative arrangement of the components and steps, the numerical expressions, and numerical values set forth in these embodiments do not limit the scope of the present invention unless it is expressively stated otherwise.

#The following descriptions provide a thorough understanding of various embodiments of the present invention. For simplicity, structures and devices as well as their variants known to those skilled in the art are not described in detail below.

#It is also understood that the components shown in the figures have not necessarily been drawn to scale.