Efficient decomposition of layouts
AssigneeKabushiki Kaisha Toshiba
InventorYoko Takekawa
Life of this patent
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Abstract
Described herein are methods and systems for efficiently preparing a wafer layout for processing into a photomask. Portions of layouts containing semiconductor features and designs that are frequently used can be stored in a database. These portions can be post-decomposition, with all treatment and error checking already performed upon them. When a wafer layout is received for processing into a photomask, the processing and decomposition time can be reduced by analyzing the layout, and replacing sections of the layout with the portions from the database that have already been decomposed and processed. As these sections no longer need to be decomposed, error checked, and treated, the processing time is greatly reduced, and photomasks can be made quicker and more efficiently.
Claims20
A system for preparing a set of photomasks, comprising:
- a microprocessor configured to execute instructions from a memory;
- a database that stores portions of layouts in a library, the portions of layouts are decomposed into two or more layers, wherein the portions of layouts are prepared for sidewall image transfer;
- a pattern matching component that receives a layout and analyzes the layout and searches through the portions stored in the database to determine a portion matching a section of the layout;
- an extraction component that removes the section of the layout that matches the portion;
- and
- a decomposition component that decomposes the layout from which the section has been extracted, and adds the portion to the decomposed layout.
A method for creating a photomask by a microprocessor, comprising:
- decomposing portions of layouts that are stored in a library, wherein the layouts are decomposed into two or more layers, and the portions of layouts are prepared for sidewall image transfer;
- receiving a layout;
- analyzing the layout and searches through the portions stored in the database to determine a portion matching a section of the layout;
- removing the section of the layout that corresponds to the matching portion;
- and
- decomposing the layout from which the section has been extracted, and adding the portion to the decomposed layout.
A non-transitory computer readable storage medium comprising computer executable instructions that, in response to execution, cause a computing system to perform operations, comprising:
- decomposing portions of layouts stored in a library, wherein the layouts are decomposed into two or more layers, and the portions of layouts are prepared for sidewall image transfer;
- receiving a layout;
- analyzing the layout and searches through the portions stored in the database to determine a portion matching a section of the layout;
- removing the section of the layout that corresponds to the matching portion;
- and
- decomposing the layout from which the section has been extracted, and adding the portion to the decomposed layout, wherein the portion and the layout form a photomask.
Dependencies are inferred from the claim text.