Device for storing substrates

A device for storing plate-shaped substrates, wafers or test wafers including those used for manufacturing electronic components, the device comprising:

• a plurality of storage elements which follow one another in a stacking direction and are movable relative to one another, each provided for receiving at least one substrate, the storage elements are each provided with a means for supporting the substrates, the storage elements have a stacking area which is provided for placing the respective storage elements inside a stack of storage elements and at least some of the storage elements are configured as substantially the same, wherein compensation is provided to compensate for stacking errors, wherein the storage elements are arranged rotationally offset with respect to one another in relation to their circumferential direction such that the rotationally offset storage element compensate for stacking errors.

A device for storing plate-shaped substrates, wafers or test wafers including those used for manufacturing electronic components, the device comprising:

• a plurality of storage elements which follow one another in a stacking direction and are movable relative to one another, each provided for receiving at least one substrate, the storage elements are each provided with a means for supporting the substrates, the storage elements having a stacking area which is provided for placing the respective storage elements inside a stack of storage elements and at least some of the storage elements are configured as substantially the same;
• a means for introducing a medium into the stack;
• a gas conducting means arranged in the stack, said gas conducting means being arranged on said storage elements.

A device for storing plate-shaped substrates, wafers or test wafers those used for manufacturing electronic components, the device comprising:

• a plurality of storage elements which follow one another in a stacking direction and are movable relative to one another, each provided for receiving at least one substrate, the storage elements are each provided with a means for supporting the substrates, the storage elements having a stacking area which is provided for placing the respective storage elements inside a stack of storage elements and at least some of the storage elements are configured as substantially the same, said storage elements being arranged rotationally offset with respect to one another in relation to their circumferential direction such that the rotationally offset storage element compensate for stacking errors;
• a means for introducing a medium into the stack;
• a gas conducting means arranged in the stack.

A device for storing plate-shaped substrates, wafers or test wafers including those used for manufacturing electronic components, the device comprising:

• a plurality of storage elements which follow one another in a stacking direction and are movable relative to one another, each provided for receiving at least one substrate, the storage elements are each provided with means for supporting the substrates, the storage elements having a stacking area which is provided for placing the respective storage elements inside a stack of storage elements and preferably at least some of the storage elements are configured as substantially the same, said storage elements being arranged rotationally offset with respect to one another in relation to their circumferential direction such that the rotationally offset storage element compensate for stacking errors;
• a means for introducing a medium into the stack;
• a gas conducting means arranged in the stack, said gas conducting means including at least one gas conducting element through which the medium can be passed into an area provided for the placement of substrates.