Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
AssigneeNikon Corporation
InventorYuichi Shibazaki
Life of this patent
Estimating the term…
Abstract
A fine movement stage is driven by a controller, based on positional information of the fine movement stage in a measurement direction measured by a measurement system and correction information of a measurement error caused by a tilt of the fine movement stage included in the positional information. Accordingly, driving the fine movement stage with high precision becomes possible, which is not affected by a measurement error included in the positional information in a measurement direction of the measurement system that occurs due to a tilt of the fine movement stage.
Claims39
A movable body apparatus, comprising:
- a movable body which is movable substantially along a predetermined plane holding an object, and has a grating placed on a rear surface side of the object substantially parallel with the predetermined plane;
- a measurement system which irradiates a measurement light of a predetermined wavelength toward the grating on an opposite side of a mounting surface of the object, receives diffraction light from the grating originating from the measurement light, and measures positional information of the movable body in a measurement direction within the predetermined plane;
- and
- a drive system which drives the movable body, based on the positional information in the measurement direction of the movable body and correction information of a measurement error caused by a tilt of the movable body included in the positional information, wherein
- the movable body has a space inside, and
- the measurement system has a measurement member which is located in the space when the movable body is in an area within a predetermined range including a predetermined point where the movable body is to be positioned in the predetermined plane, and on the measurement member, at least a part of a head is provided which irradiates the measurement light on the grating and receives a diffraction light from the grating originating from the measurement light.
An exposure method in which an energy beam is irradiated on an object to form a predetermined pattern on the object, the method comprising:
- measuring positional information of a movable body, which holds the object and also has a grating placed substantially parallel to a predetermined plane on a rear surface side of the object, in a measurement direction within the predetermined plane, by moving the movable body along the predetermined plane, irradiating a measurement light of a predetermined wavelength toward the grating on an opposite side of a mounting surface of the object, and receiving a diffraction light from the grating originating from the measurement light;
- and
- driving the movable body, based on the positional information in the measurement direction of the movable body and correction information of a measurement error caused by a tilt of the movable body included in the positional information, wherein
- the movable body has a space inside, and
- in the measuring, the measurement is performed using a head, at least a part of the head being provided on a measurement member located in the space when the movable body is in an area within a predetermined range including a predetermined point where the movable body is to be positioned in the predetermined plane, and the head irradiating the measurement light on the grating and receiving a diffraction light from the grating originating from the measurement light.
Dependencies are inferred from the claim text.