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US 8,552,622 B2Granted
Acoustic wave device
AssigneeKYOCERA Corporation
InventorsDaisuke Makibuchi, Kazuhiro Otsuka
Life of this patent
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Abstract
An acoustic wave device according to one embodiment of the present invention has a base with a vibrating body, a sealing member which is joined to the base in a frame-shaped region surrounding the vibrating body and faces the vibrating body with a space therebetween, and an intermediate layer between the frame-shaped region of the sealing member and the base. The frame-shaped region has a recess and at least a portion of the intermediate layer is located inside the recess.
Claims8
An acoustic wave device, comprising:
- a base with a vibrating body;
- a sealing member which is joined to the base in a frame-shaped region surrounding the vibrating body and faces the vibrating body with a space therebetween;
- an intermediate layer between the frame-shaped region of the sealing member and the base;
- and
- an electrode post penetrating the intermediate layer,
- wherein the frame-shaped region has a recess and at least a portion of the intermediate layer is located inside the recess, and at a hole in the intermediate layer through which the electrode post penetrates, an inner circumferential surface of the hole has a portion contacting the electrode post, the portion being inclined so that the diameter of the hole becomes smaller from the sealing member side toward the base side.
3 more elements
Dependencies are inferred from the claim text.