Optical component having reduced dependency on etch depth
AssigneeKotura, Inc.
InventorsCheng-Chih Kung, Shirong Liao
Life of this patent
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Abstract
An optical device includes an active component on a base. The active component is a light sensor and/or a light modulator. The active component is configured to guide a light signal through a ridge of an active medium extending upwards from slab regions of the active medium. The slab regions are on opposing sides of the ridge. The active medium includes a doped region that extends into a lateral side of the ridge and also into one of the slab regions. The depth that the doped region extends into the slab region is further than the depth that the doped region extends into the ridge.
Claims20
An optical device, comprising:
- an active component on a base and having at least one functionality selected from a group consisting of light sensor functionality and light modulator functionality,
- the active component configured to guide the light signal through a ridge of an active medium extending upwards from slab regions of the active medium, the slab regions being on opposing sides of the ridge,
- the active medium including a doped region extending into a lateral side of the ridge and also into one of the slab regions of the active medium, and
- a depth that the doped region extends into the slab region being further than a depth that the doped region extends into the ridge.
A method of forming an optical device comprising:
- generating a device precursor having
- a precursor for an active component for providing at least one functionality selected from a group consisting of light sensor functionality and light modulator functionality,
- the active component precursor having a ridge of an active medium extending upwards from slab regions of the active medium, the slab regions being on opposing sides of the ridge;
- and
- forming a doped region that extends into a lateral side of the ridge and also into one of the slab regions of the active medium such that a depth that the doped region extends into the slab region is further than a depth that the doped region extends into the ridge.
Dependencies are inferred from the claim text.