Sound transducer structure and method for manufacturing a sound transducer structure
AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Stefan Barzen, Marc Fueldner
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AssigneeInfineon Technologies AG
InventorsAlfons Dehe, Stefan Barzen, Marc Fueldner
Estimating the term…
A sound transducer structure includes a membrane, a counter electrode, and a plurality of elevations. The membrane includes a first main surface, made of a membrane material, in a sound transducing region and an edge region of the membrane. The counter electrode is made of counter electrode material, and includes a second main surface arranged in parallel to the first main surface of the membrane on a side of a free volume opposite the first main surface of the membrane. The plurality of elevations extend in the sound transducing region from the second main surface of the counter electrode into the free volume.
A sound transducer structure, comprising:
Dependencies are inferred from the claim text.