Miniature microphone assembly with hydrophobic surface coating

A method of manufacturing a miniature microphone assembly, the method comprising:

• providing a microphone carrier comprising a carrier electrical terminal formed on a first surface of the microphone carrier;
• providing a capacitive microphone transducer comprising a transducer electrical terminal;
• providing an integrated circuit die comprising a die electrical terminal operatively coupled to signal amplification or signal conditioning circuitry of the integrated circuit die;
• attaching the capacitive microphone transducer and the integrated circuit die to the first surface of the microphone carrier;
• electrically interconnecting the transducer electrical terminal and the die electrical terminal through electrical traces formed on or in the microphone carrier;
• placing the miniature microphone assembly in a vapour phase deposition chamber or liquid phase deposition container;
• and
• depositing a hydrophobic layer or coating onto the first surface of the microphone carrier, wherein the deposited hydrophobic layer or coating is solely comprised of a self-assembled molecular monolayer exposed directly to moisture to protect the first surface of the microphone carrier.