Method and apparatus for cross-section processing and observation

A cross-section processing and observation method in a focused ion beam apparatus, the method comprising:

• positioning a sample in the focused ion beam apparatus and forming a first cross section in the sample by etching processing using a focused ion beam;
• obtaining an observation image of the first cross section by irradiating the first cross section with the focused ion beam;
• forming a second cross section by etching the first cross section using the focused ion beam;
• obtaining an observation image of the second cross section by irradiating the focused ion beam on an irradiation region including the second cross section;
• displaying portional image information of a part of a display region of the irradiation region from the observation image of the second cross section;
• displaying image information of the first cross section by superimposing a translucent image of the observation image of the first cross section on the portional image information;
• and
• moving the display region within the irradiation region, and obtaining observation images of the sample without positional displacement of display regions between the observation image of the first cross section and the observation image of the second cross section.