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US 8,542,074 B2Granted
MEMS resonator
AssigneePanasonic Corporation
InventorKunihiko Nakamura
Life of this patent
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Abstract
A MEMS resonator including: an input port which is applied with an input voltage; an output port which outputs an output current; and N MEMS resonating units (N being an integer greater than or equal to 2), the MEMS resonating unit each including a vibrator and being connected to the input port and output port, in which the N MEMS resonating units are serially connected to the input port.
Claims9
A MEMS resonator, comprising:
- an input port that is applied with an input voltage;
- an output port that outputs an output current;
- and
- N MEMS resonating units, each of the N MEMS resonating units including a vibrator and being connected to the input port and output port, and N being an integer greater than or equal to 2,
- wherein the N MEMS resonating units are serially connected to the input port,
- wherein in each of the N MEMS resonating units, the vibrator and an electrode that is opposed to the vibrator with a gap interposed therebetween form an input-side capacitance,
- wherein the input-side capacitance of at least one of the N MEMS resonating units is connected with an input-side capacitance of another one of the MEMS resonating units via an additional capacitive element,
- wherein the input-side capacitance of the at least one of the MEMS resonating units and the input-side capacitance of the other one of the MEMS resonating units are serially connected to the input port via the additional capacitive element, and
- wherein the additional capacitive element has capacitance higher than the input-side capacitances of the N MEMS resonating units.
6 more elements
Dependencies are inferred from the claim text.