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US 8,541,842 B2Granted
High-k transistors with low threshold voltage
AssigneeInternational Business Machines Corporation
InventorMartin M. Frank
Life of this patent
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Abstract
A semiconductor structure includes a high-k dielectric layer over a semiconductor substrate; and a gate layer over the high-k dielectric layer, wherein the gate layer has a negative electrical bias during anneal.
Claims19
A semiconductor structure comprising:
- a plurality of p-type and n-type transistor devices formed over a substrate, each of the transistor devices comprising a high-k dielectric layer over the semiconductor substrate, and a gate layer over the high-k dielectric layer;
- an insulating layer disposed over the gate layer of only the n-type transistor devices;
- and
- a metal layer formed over the insulating layer and the gate layer of the p-type transistor devices so as to electrically connect the plurality of p-type devices to one another;
- wherein the gate layer of only the p-type transistor devices is configured to receive a negative electrical bias during anneal.
2 more elements
Dependencies are inferred from the claim text.