Precession diffraction charged particle beam system

A charged particle system, comprising:

• a charged particle beam generator configured to generate a charged particle beam having a beam path;
• a first lens configured to focus the charged particle beam generated in an object plane;
• a second lens located downstream of the object plane along the beam path, the second lens having a diffraction plane;
• a first lens doublet located downstream of the second lens along the beam path, the first lens doublet comprising a third lens and a fourth lens, the first lens doublet being configured to image the diffraction plane into a first intermediate diffraction plane;
• a first multipole located at the first intermediate diffraction plane;
• a second lens doublet located downstream of the first multipole along the beam path, the second lens doublet comprising a fifth lens and a sixth lens, the second lens doublet being configured to image the first intermediate diffraction plane into a second intermediate diffraction plane;
• a second multipole located at the second intermediate diffraction plane;
• a first deflection system upstream of the object plane along the beam path, the first deflection system being configured to tilt the charged particle beam about the object plane so that the charged particle beam is obliquely incident on the object plane;
• a second deflection system located downstream of the third lens along the beam path and upstream of the fourth lens along the beam path, the second deflection system being configured to tilt the charged particle beam to compensate for tilting of the charged particle beam due to the first deflection system;
• a tilt controller configured to synchronously control an amount by which the charged particle beam tilts due to the first deflection system and an amount by which the charged particle beam tilts due to the second deflection system;
• and
• a corrector controller comprising a low pass filter configured to control the second deflection system,
• wherein:
• the second and third lenses are configured to image the object plane into an intermediate image plane located downstream of the third lens along the beam path and upstream of the fourth lens along the beam path;
• the second deflection system is configured to tilt the beam about the intermediate image plane;
• the fourth and fifth lenses are configured to image the first intermediate image plane into a second intermediate image plane located downstream of the fifth lens along the beam path and upstream of the sixth lens along the beam path;
• and
• the corrector controller is configured to control at least one element selected from the group consisting of the third lens, the fourth lens, the fifth lens, the sixth lens, the first multipole and the second multipole.