Method of manufacturing semiconductor device, semiconductor device thus manufactured, and semiconductor manufacturing apparatus

A method of manufacturing a semiconductor device, the method comprising:

• forming a plurality of external connection terminals over a semiconductor substrate which has a protective insulating film, a plurality of openings formed in said protective insulating film, and a plurality of electrode pads respectively exposed in said plurality of openings,
• said forming a plurality of external connection terminals comprising:
• forming a plurality of projections respectively given later as cores of said plurality of external connection terminals, by selectively forming a curable resin layer over said protective insulating film;
• forming flat portions respectively on the top surfaces of said plurality of projections that are formed over said protective insulating film, by pressing a molding jig having a flat surface onto said top surfaces, before said projections are cured and after said projections are formed by selectively forming the curable resin layer over said protective insulating film;
• curing said plurality of projections;
• and
• forming said plurality of external connection terminals, and said plurality of interconnects which respectively connect said plurality of external connection terminals to said electrode pads, by selectively forming an electro-conductive film over said plurality of projections, said protective insulating film, and said plurality of electrode pads after forming the flat portions on the top surfaces of said plurality of projections formed over said protective insulating film.