Method for manufacturing a package-on-package type semiconductor device
AssigneeRenesas Electronics Corporation
InventorsTakashi Kikuchi, Tomoaki Hashimoto, Tatsuya Hirai
Life of this patent
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Abstract
Bump electrodes (conductive members) bonded onto lands disposed at a peripheral portion side than terminals (bonding leads) electrically coupled to pads (electrode pads) of a microcomputer chip (semiconductor chip) are sealed with sealing resin (a sealing body). Thereafter, the sealing resin is ground (removed) partially such that a part of each of the bump electrodes is exposed. The step of protruding the part of each of the bump electrodes from a front surface of the sealing resin is performed, after the grinding step.
Claims6
A method of manufacturing a semiconductor device comprising the steps of:
- (a) providing a first wiring substrate including a first upper surface, a plurality of first bonding leads formed on the first upper surface, a plurality of first lands formed on the first upper surface and arranged closer to a peripheral portion of the first upper surface than the first bonding leads, a first lower surface opposite the first upper surface, and a plurality of second lands formed on the first lower surface, the first lands being electrically connected with the first bonding leads, respectively;
- (b) disposing a plurality of electrodes over the first lands of the first wiring substrate, respectively, and mounting a first semiconductor chip over the first upper surface of the first wiring substrate, each of the electrodes being comprised of a solder material, the first semiconductor chip including a main surface, a plurality of pads formed on the main surface, and a back surface opposite the main surface;
- (c) electrically connecting the pads of the first semiconductor chip with the first bonding leads of the first wiring substrate via a plurality of conductive members, respectively;
- (d) sealing the first semiconductor chip and the electrodes with resin forming a sealing body;
- (e) after the step (d), removing a portion of the sealing body such that a part of each of the electrodes is exposed from an upper surface of the sealing body;
- (f) after the step (e), performing a heat treatment without stacking another member on the electrodes such that the part of each of the electrodes is caused to protrude from the upper surface of the sealing body;
- and
- (g) after the step (f), stacking a second wiring substrate over the upper surface of the sealing body and electrically connecting a plurality of third lands of the second wiring substrate with the first lands of the first wiring substrate via the electrodes, respectively,
- wherein the second wiring substrate includes a second main surface, a plurality of fourth lands formed on the second main surface, a second back surface opposite the second main surface, and the third lands formed on the second back surface, and
- the third lands are electrically connected with the fourth lands, respectively.
Dependencies are inferred from the claim text.