(Li, Na, K, Bi)(Nb, Ta)O3 based piezoelectric material and manufacturing method of the same
AssigneeNGK Insulators, Ltd.
InventorsKazuyuki Kaigawa, Ritsu Tanaka, Hirofumi Yamaguchi
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Abstract
Piezoelectric materials having improved electrical properties, and manufacturing methods of the same, are provided. In (Li, Na, K, Bi)(Nb, Ta)O3 based piezoelectric materials, the surface microstructures of sintered bodies include microscopic grains having grain diameters of less than 5 μm, intermediate grains having grain diameters of 5 μm or more and less than 15 μm, and coarse grains having grain diameters of 15 μm or more and 100 μm or less.
Claims10
An (Li, Na, K, Bi)(Nb, Ta)O3 based piezoelectric material containing Mn, wherein a surface microstructure of a sintered body of the (Li, Na, K, Bi) (Nb, Ta)O3 based piezoelectric material is constituted of microscopic grains having grain diameters of less than 5 μm, intermediate grains having grain diameters of 5 μm or more and less than 15 μm, and coarse grains having grain diameters of 15 μm or more and 100 μm or less, and wherein the surface microstructure of the sintered both includes 10 to 60% of the microscopic grains and 1% or more of the coarse grains in share of grains in terms of area.
Dependencies are inferred from the claim text.