Light-induced directed self-assembly of periodic sub-wavelength nanostructures
AssigneeThe University of North Carolina at Charlotte
InventorsTsing-Hua Her, Haitao Zhang, Mingzhen Tang
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AssigneeThe University of North Carolina at Charlotte
InventorsTsing-Hua Her, Haitao Zhang, Mingzhen Tang
Estimating the term…
In various exemplary embodiments, the present invention provides a system for the light-induced directed self-assembly (LIDSA) of periodic sub-wavelength nanostructures, including: a light source for delivering a beam of photons; a reaction chamber disposed adjacent to the light source; a gas including one or more precursor materials disposed within the reaction chamber; and a substrate disposed within the reaction chamber, wherein the substrate is positioned and configured to receive the beam of photons; wherein the beam of photons causes a periodic sub-wavelength nanostructure of one or more constituents of the one or more precursor materials to form on a surface of the substrate. In various exemplary embodiments, the present invention also provides an associated method.
A method for the light-induced directed self-assembly of periodic sub-wavelength nanostructures, comprising:
Dependencies are inferred from the claim text.