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US 8,541,054 B2Granted
Methods for preparation of one-dimensional carbon nanostructures
AssigneeHonda Motor Co., Ltd.
InventorAvetik Harutyunyan
Life of this patent
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Abstract
A method for synthesizing carbon nanostructures is provided. A metalorganic layer is deposited on a substrate that has a deposition mask. The mask is removed, which also removes the portion of the metalorganic precursor deposited on the mask. The remaining portions of the metal organic layer are oxidized to produce a metal growth catalyst on the substrate that can be used for synthesis of carbon nanostructures.
Claims14
A method for synthesizing single wall carbon nanotubes, the method comprising the steps of:
- providing a substrate having a deposition mask;
- depositing a bimetallic or trimetallic metalorganic layer on the substrate, wherein at least a portion of the bimetallic or trimetallic metalorganic layer is deposited on an unmasked portion of the substrate, and wherein the bimetallic or trimetallic metalorganic layer comprises an organic portion and an inorganic portion, and wherein the bimetallic or trimetallic metalorganic layer has a thickness of 1 micron;
- removing the deposition mask from the substrate;
- exposing said portion of the bimetallic or trimetallic metalorganic layer to air;
- pyrolyzing the organic portion of said portion of the bimetallic or trimetallic metalorganic layer by exposing said portion to air and heating said portion to a temperature of between 450° C. and 500° C. for between 2 to 4 hours to form a growth catalyst on the substrate;
- and
- exposing the substrate to a carbon precursor gas at a deposition temperature to form single wall carbon nanotubes.
4 more elements
Dependencies are inferred from the claim text.