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US 8,540,922 B2Granted
Laser patterning of a carbon nanotube layer
AssigneeHewlett-Packard Development Company, L.P.
InventorsLynn Sheehan, Kevin Dooley, Rory Jordan
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Abstract
A method of patterning a carbon nanotube layer includes providing a substrate comprising a carbon nanotube layer. A laser beam is generated. The laser beam is directed onto a first surface of the carbon nanotube layer. Relative movement between the laser beam and the first surface is caused, thereby forming at least one cavity feature on the first surface.
Claims18
A method of patterning a carbon nanotube layer, the method comprising:
- providing a substrate comprising a carbon nanotube layer formed on a substrate layer;
- generating a laser beam;
- directing the laser beam onto a first surface of the carbon nanotube layer;
- and
- causing relative movement between the laser beam and the first surface to selectively remove a portion of the carbon nanotube layer during the relative movement without damaging the substrate layer, thereby forming at least one cavity feature on the first surface.
2 more elements
The method of claim l, and further comprising:
- modifying a power of the laser beam to below a threshold value during the relative movement to prevent ablation of the carbon nanotube layer;
- and
- modifying a power of the laser beam to above the threshold value during the relative movement to cause ablation of the carbon nanotube layer and form the at least one cavity feature.
Dependencies are inferred from the claim text.