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US 8,540,888 B1Granted
Methods of patterning layered-material and forming imprinting mold
AssigneeIndustrial Technology Research Institute
InventorsChin-Tien Yang, Ming-Chia Li, Chung-Ta Cheng
Life of this patent
Estimating the term…
Abstract
Disclosed is a method of patterning a layered material. A layered material is provided, and a photoresist layer is formed thereon. The photoresist layer is patterned by a focused laser beam to expose a part of the layered material. The exposed layered material is etched to pattern the layered material.
Claims14
A method of patterning a layered material, comprising:
- providing a layered material;
- forming a photoresist layer on the layered material;
- patterning the photoresist layer by a focused laser beam to expose a part of the layered material;
- and
- etching the exposed part of the layered material to pattern the layered material,
- wherein the photoresist layer has a chemical structure as shown in Formula 1, 2, 3, 4, 5, 6, or 7, and the Formulae are as follows:
- wherein each A independently represents a substituted or a non-substituted cyclic alkyl group;
- R1 represents a CH2 group, an oxygen atom, or a SO2 group;
- each R2 independently represents a hydrogen atom, an azo group, or a substituted or a non-substituted polymethine group;
- each X1 independently represent an oxygen atom, a CH2 group, an alkyl group, or an N—R3 group, wherein R3 represents a hydrogen atom, a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 as carboxyl group, a substituted or a non-substituted C1-18 arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X2 independently represents an oxygen atom or a C(CN)2 group;
- and
- each X3 independently represents an oxygen atom posing one negative charge, a hydroxyl group, or a C(CN)2 group;
- wherein each B independently represents a substituted or a non-substituted aromatic hydrocarbon ring, a substituted or a non-substituted aromatic heterocyclic ring, or a substituted or a non-substituted condensed ring including an aromatic hydrocarbon ring;
- each R4 independently represents a hydrogen atom, a C═S group, a substituted or non-substituted alkyl group, a substituted or non-substituted aryl group, a substituted or non-substituted aralkyl group, or a substituted or non-substituted heterocyclic group;
- each X4 independently represents an oxygen atom, a substituted or non-substituted alkyl group, or an N—R5 group, wherein R5 represents a hydrogen atom, a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each R5 independently represents an oxygen atom, a C(CN)2 group, or a C═O group;
- and
- M represents Fe, Co, Cu, Ni, or Zn;
- wherein C represents a substituted or a non-substituted cyclic alkyl group;
- each L independently represents a substituted or a non-substituted methine group;
- each R6 independently represents a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X6 independently represents an oxygen atom, a CH2 group, or an N—R7 group, wherein R7 represents a substituted or a non-substituted C1-18 alkyl group;
- each X7 independently represents an oxygen atom or a C(CN)2 group;
- each X8 independently represents a substituted or a non-substituted alkylene group, or an a substituted or a non-substituted alkylene group containing an oxygen atom, a sulfur atom, a selenium atom, or a nitrogen atom;
- and
- each m independently represents an integer of 0 or 1;
- wherein each L′ independently represent a substituted or a non-substituted methine group;
- each R8 independently represents a hydrogen atom, a substituted or a non-substituted alkyl group, a substituted or a non-substituted aryl group, a substituted or a non-substituted aralkyl group, a substituted or a non-substituted heterocyclic ring, or a ferrocenyl group;
- R9 represents a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X9 independently represents an oxygen atom, a CH2 group, or an N—R10 group, wherein R10 represents a substituted or a non-substituted C1-18 alkyl group;
- each X10 independently represents an oxygen atom or a C(CN)2 group;
- X11 represents a substituted or a non-substituted alkylene group, or a substituted or a non-substituted alkylene group containing an oxygen atom, a sulfur atom, a selenium atom, or a nitrogen atom;
- and
- n is an integer of 0 or 1;
- wherein each L″ independently represent a substituted or a non-substituted methine group;
- each R11 independently represents a hydrogen atom, a substituted or a non-substituted alkyl group, a substituted or a non-substituted aryl group, a substituted or a non-substituted aralkyl group, or a substituted or a non-substituted heterocyclic ring;
- R12 represents a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X12 independently represents an oxygen atom, a CH2 group, or an N—R13 group, wherein R13 represents a substituted or a non-substituted C1-18 alkyl group;
- each X13 independently represents an oxygen atom or a C(CN)2 group;
- each X14 independently represents a substituted or a non-substituted alkylene group, or a substituted or a non-substituted alkylene group containing an oxygen atom, a sulfur atom, a selenium atom, or a nitrogen atom;
- and
- each k independently represents an integer of 0 or 1;
- wherein each L′ independently represent a substituted or a non-substituted methine group;
- R14 represents a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X15 independently represents an oxygen atom, a sulfur atom, a CH2 group, or an N—R15 group, wherein R15 represents a hydrogen atom or a substituted or a non-substituted C1-18 alkyl group;
- each X16 independently represents an oxygen atom, a sulfur atom, or a C(CN)2 group;
- X17 represents a substituted or a non-substituted alkylene group, or a substituted or a non-substituted alkylene group containing an oxygen 125 atom, a sulfur atom, a selenium atom, or a nitrogen atom;
- and
- n is an integer of 0 or 1.
47 more elements
A method of forming an imprinting mold, comprising:
- providing a layered material;
- forming a photoresist layer on the layered material;
- patterning the photoresist layer by a focused laser beam to expose a part of the layered material;
- plating a metal layer on the patterned photoresist layer and the exposed part of the layered material;
- and
- removing the patterned photoresist layer and the layered material from the metal layer to obtain an imprinting mold,
- wherein the photoresist layer has a chemical structure as shown in Formula 1, 2, 3, 4, 5, 6, or 7, and the Formulae are as follows:
- wherein each A independently represents a substituted or a non-substituted cyclic alkyl group;
- R1 represents a CH2 group, an oxygen atom, or a SO2 group;
- each R2 independently represents a hydrogen atom, an azo group, or a substituted or a non-substituted polymethine group;
- each X1 independently represent an oxygen atom, a CH2 group, an alkyl group, or an N—R3 group, wherein R3 represents a hydrogen atom, a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X2 independently represents an oxygen atom or a C(CN)2 group;
- and
- each X3 independently represents an oxygen atom posing one negative charge, a hydroxyl group, or a C(CN)2 group;
- wherein each B independently represents a substituted or a non-substituted aromatic hydrocarbon ring, a substituted or a non-substituted aromatic heterocyclic ring, or a substituted or a non-substituted condensed ring including an aromatic hydrocarbon ring;
- each R4 independently represents a hydrogen atom, a C═S group, a substituted or non-substituted alkyl group, a substituted or non-substituted aryl group, a substituted or non-substituted aralkyl group, or a substituted or non-substituted heterocyclic group;
- each X4 independently represents an oxygen atom, a substituted or non-substituted alkyl group, or an N—R5 group, wherein R5 represents a hydrogen atom, a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each R5 independently represents an oxygen atom, a C(CN)2 group, or a C═O group;
- and
- M represents Fe, Co, Cu, Ni, or Zn;
- wherein C represents a substituted or a non-substituted cyclic alkyl group;
- each L independently represents a substituted or a non-substituted methine group;
- each R6 independently represents a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X6 independently represents an oxygen atom, a CH2 group, or an N—R7 group, wherein R7 represents a substituted or a non-substituted C1-18 alkyl group;
- each X7 independently represents an oxygen atom or a C(CN)2 group:
- each X8 independently represents a substituted or a non-substituted alkylene group, or an a substituted or a non-substituted alkylene group containing an oxygen atom, a sulfur atom, a selenium atom, or a nitrogen atom;
- and
- each m independently represents an integer of 0 or 1;
- wherein each L′independently represent a substituted or a non-substituted methine group;
- each R8 independently represents a hydrogen atom, a substituted or a non-substituted alkyl group, a substituted or a non-substituted aryl group, a substituted or a non-substituted aralkyl group, a substituted or a non-substituted heterocyclic ring, or a ferrocenyl group;
- R9 represents a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X9 independently represents an oxygen atom, a CH2 group, or an N—R10 group, wherein R10 represents a substituted or a non-substituted C1-18 alkyl group;
- each X10 independently represents an oxygen atom or a C(CN)2 group;
- X11 represents a substituted or a non-substituted alkylene group, or a substituted or a non-substituted alkylene group containing an oxygen atom, a sulfur atom, a selenium atom, or a nitrogen atom;
- and
- n is an integer of 0 or 1;
- wherein each L″ independently represent a substituted or a non-substituted methine group:
- each R11 independently represents a hydrogen atom, a substituted or a non-substituted alkyl group, a substituted or a non-substituted aryl group, a substituted or a non-substituted aralkyl group, or a substituted or a non-substituted heterocyclic ring;
- R12 represents a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X12 independently represents an oxygen atom, a CH2 group, or an N—R13 group, wherein R13 represents a substituted or a non-substituted C1-18 alkyl group;
- each X13 independently represents an oxygen atom or a C(CN)2 group;
- each X14 independently represents a substituted or a non-substituted alkylene group, or a substituted or a non-substituted alkylene group containing an oxygen atom, a sulfur atom, a selenium atom, or a nitrogen atom;
- and
- each k independently represents an integer of 0 or 1;
- wherein each L′ independently represent a substituted or a non-substituted methine group;
- R14 represents a substituted or a non-substituted C1-18 alkyl group, a substituted or a non-substituted C1-18 alkoxy group, a substituted or a non-substituted C1-18 carboxyl group, a substituted or a non-substituted C1-18 alkyl ester group, a substituted or a non-substituted arylester group, an adamantyl carbonyl group, an adamantyl group, or a substituted or a non-substituted aralkyl group;
- each X15 independently represents an oxygen atom, a sulfur atom, a CH2 group, or an N—R15 group, wherein R15 represents a hydrogen atom or a substituted or a non-substituted C1-18 alkyl group;
- each X16 independently represents an oxygen atom, a sulfur atom, or a C(CN)2 group;
- X17 represents a substituted or a non-substituted alkylene group, or a substituted or a non-substituted alkylene group containing an oxygen atom, a sulfur atom, a selenium atom, or a nitrogen atom;
- and
- n is an integer of 0 or 1.
48 more elements
Dependencies are inferred from the claim text.