Gigasonic brush for cleaning surfaces

An apparatus comprising:

• a substrate;
• an array of acoustic transducers coupled to the substrate, the acoustic transducers having sizes in the range of 9 square micrometers to 250,000 square micrometers;
• and
• a cleaning liquid supply arranged to provide a cleaning liquid to couple the array of acoustic transducers to a target surface;
• where the array of acoustic transducers is configured to directly excite a particle having a diameter in the range of 1 nanometer to 500 nanometers on the target surface with acoustic waves at one or more frequencies in the range of 10 Megahertz to 10 Gigahertz from the array of acoustic transducers.

An apparatus comprising:

• a low frequency acoustic transducer configured to operate within a first acoustic frequency range;
• an array of high frequency acoustic transducers coupled to the low frequency acoustic transducer, the high frequency acoustic transducers having sizes in the range of 9 square micrometers to 250,000 square micrometers, the high frequency acoustic transducers configured to operate within a second acoustic frequency range, where the second acoustic frequency range is higher than the first acoustic frequency range and where the second acoustic frequency range is 10 MHz to 10 GHz;
• and
• a cleaning liquid supply arranged to provide a cleaning liquid to couple the array of acoustic transducers to a target surface;
• where the array of high frequency acoustic transducers is configured to directly excite a particle having a diameter in the range of 1 nanometer to 500 nanometers on the target surface with acoustic waves at one or more frequencies in the second acoustic frequency range.