Film forming apparatus, film forming method and storage medium

A film forming apparatus comprising:

• a processing chamber;
• a mounting table disposed in the processing chamber to mount a substrate thereon;
• a gas shower head facing the substrate mounted on the mounting table, having gas supply holes, and including a central region facing a central portion of the substrate and a peripheral region facing a peripheral portion of the substrate;
• a first processing gas supply unit including a first processing gas supply line which is configured to supply a first processing gas only to the central region of the gas shower head;
• a second processing gas supply unit including a second processing gas supply line to supply a second processing gas to the central region of the gas shower head;
• an energy supply unit for supplying energy to the substrate;
• a purge gas supply unit for supplying a purge gas to the central region and the peripheral region of the gas shower head;
• and
• a control unit configured to control the first and the second processing gas supply unit, the energy supply unit, and the purge gas supply unit to perform operations including:
• supplying the first processing gas only to the central region of the gas shower head through the first processing gas supply line so that the first processing gas is adsorbed on the substrate;
• stopping said supplying the first processing gas and then supplying the purge gas to the central region and the peripheral region of the gas shower head;
• stopping supplying the purge gas to the central region of the gas shower head and then supplying the second processing gas to the central region of the gas shower head;
• and
• supplying the energy to the substrate so that the first processing gas adsorbed on the substrate reacts with the second processing gas,
• wherein the control unit is configured such that the film forming apparatus performs, by the operations, an atomic layer deposition on the substrate, and
• wherein an area of the central region of the gas shower head is 50% or less of an area of the peripheral region of the gas shower head.