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US 8,539,854 B2Granted
Microrobots with large actuation volumes, and controllers, systems, and methods
AssigneeBoard of Regents, The University of Texas System
InventorsDan O. Popa, Rakesh Murthy
Life of this patent
Estimating the term…
Abstract
Robots, and atomic force microscopes including robots, that utilize in-plane actuators to provide large out-of-plane working volumes and forces.
Claims19
A robot comprising:
- a first actuator drive having a first shuttle and one or more in-plane actuators coupled to the first shuttle, the first actuator drive configured such that the one or more actuators are actuatable to move the first shuttle along a first plane;
- an arm having a base portion and a cantilever portion movably coupled to and extending from the base portion, the base portion coupled in fixed relation to the first shuttle of the first actuator drive;
- a second actuator drive having a second shuttle and one or more in-plane actuators coupled to the second shuttle, the second actuator drive configured such that the one or more actuators are actuatable to move the second shuttle along a second plane;
- a cable having a first end coupled to the second shuttle of the second actuator drive and a second end coupled to the cantilever portion of the arm.
1 more element
A robot comprising:
- a first actuator drive having a first shuttle and two in-plane actuators coupled to the first shuttle, the first actuator drive configured such that the actuators are actuatable to move the first shuttle along a first plane;
- an arm having a base portion and a cantilever portion movably coupled to and extending from the base portion, the base portion coupled in fixed relation to the first shuttle of the first actuator drive;
- a second actuator drive having a second shuttle and two in-plane actuators coupled to the second shuttle, the second actuator drive configured such that the actuators are actuatable to move the second shuttle along the first plane;
- a cable having a first end coupled to the second shuttle of the second actuator drive and a second end coupled to the cantilever portion of the arm;
- where the maximum dimensions of the robot do not exceed 3.2 mm×2.2 mm×1.2 mm, the cantilever portion of the arm comprises an end effector, and the robot is configured such that the actuator drives are actuatable along the first plane to move the move the end effector laterally by at least 40 μm, longitudinally by at least 40 μm, and vertically by at least 50 μm.
2 more elements
An atomic force microscope comprising:
- a robot comprising:
- a first actuator drive having a first shuttle and one or more in-plane actuators coupled to the first shuttle, the first actuator drive configured such that the one or more actuators are actuatable to move the first shuttle along a first plane;
- an arm having a base portion and a cantilever portion movably coupled to and extending from the base portion, the base portion coupled in fixed relation to the first shuttle of the first actuator drive, the cantilever portion having a distal end with a probe tip;
- a second actuator drive having a second shuttle and one or more in-plane actuators coupled to the second shuttle, the second actuator drive configured such that the one or more actuators are actuatable to move the second shuttle along a second plane;
- a cable having a first end coupled to the second shuttle of the second actuator drive and a second end coupled to the cantilever portion of the arm;
- and
- a detector module coupled to the robot for sensing the position of the probe tip.
4 more elements
Dependencies are inferred from the claim text.