MEMS sensor with dual proof masses

A device comprising:

• a microelectromechanical systems (MEMS) sensor, said MEMS sensor comprising:
• a substrate;
• a first movable element positioned in spaced apart relationship above a generally planar surface of said substrate and adapted for rotational motion about a first rotational axis positioned between first and second ends of said first movable element;
• and
• a second movable element positioned in spaced apart relationship above said surface of said substrate and adapted for rotational motion about a second rotational axis positioned between third and fourth ends of said second movable element, said first and second rotational axes extending alone a common rotational axis, said first and second movable elements having a substantially equivalent shape and said second movable element being generally oriented in rotational symmetry relative to said first movable element about a point location on said planar surface of said substrate such that said first and second movable elements are disposed beside one another along a direction of said common rotational axis, said second movable element being located in an orientation that is rotated about said point location approximately one hundred and eighty degrees relative to said first movable element, wherein:
• said first movable element includes a first section between said first rotational axis and said first end and a second section between said first rotational axis and said second end, said first rotational axis being offset between said first and second ends such that a first length of said first section between said first rotational axis and said first end is greater than a second length of said second section between said first rotational axis and said second end;
• and
• said second movable element includes a third section between said second rotational axis and said third end and a fourth section between said second rotational axis and said fourth end, said second rotational axis being offset between said third and fourth ends such that a third length of said third section between said second rotational axis and said third end is less than a fourth length of said fourth section between said second rotational axis and said fourth end.

A microelectromechanical systems (MEMS) sensor comprising:

• a substrate;
• a first movable element positioned in spaced apart relationship above a generally planar surface of said substrate;
• a second movable element positioned in spaced apart relationship above said surface of said substrate, said first and second movable elements having a substantially equivalent shape and said second movable element being generally oriented in rotational symmetry relative to said first movable element about a point location on said planar surface of said substrate such that said first and second movable elements are disposed beside one another along a direction of a common rotational axis, and said first and second rotational axes extend along said common rotational axis, said second movable element being located in an orientation that is rotated about said point location approximately one hundred and eighty degrees relative to said first movable element, each of said first and second movable elements being adapted for rotational motion about said common rotational axis;
• a first sensing element disposed on said substrate beneath each of said first and second movable elements;
• and
• a second sensing element disposed on said substrate beneath said each of said first and second movable elements, each of said first and second sensing elements being displaced away from and on opposite sides of said common rotational axis by a substantially equivalent distance, and said first and second sensing elements being adapted to detect movement of said first and second movable elements about said common rotational axis along an axis perpendicular to said planar surface of said substrate, wherein:
• said first movable element includes first and second ends, a first section between said common rotational axis and said first end, and a second section between said common rotational axis and said second end, wherein a first length of said first section between said common rotational axis and said first end is greater than a second length of said second section between said common rotational axis and said second end;
• and
• said second movable element includes third and fourth ends, a third section between said common rotational axis and said third end, and a fourth section between said common rotational axis and said fourth end, wherein a third length of said third section between said common rotational axis and said third end is less than a fourth length of said fourth section between said common rotational axis and said fourth end.