Material measures for use in evaluating performance of measuring instrument for measuring surface texture
AssigneeOlympus Corporation
InventorsTakahiko Kakemizu, Akihiro Fujii
Life of this patent
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Abstract
A material measure for use in evaluating the performance of a measuring instrument for measuring surface texture includes: a measurement area having a plurality of grooves in a predetermined direction. With the configuration, each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction; and a length of the cross-sectional shape in the predetermined direction is different for the predetermined number of adjacent grooves in the predetermined direction.
Claims13
A material measure for use in evaluating performance of a measuring instrument for measuring surface texture, comprising
- a measurement area having a plurality of grooves in a predetermined direction, wherein:
- each of the grooves has a simple cross-sectional shape at a cross-section along the predetermined direction;
- a length of the cross-sectional shape in the predetermined direction is different for a predetermined number of adjacent grooves in the predetermined direction,
- the plurality of grooves are linear grooves formed in parallel with a direction orthogonal to the cross-section,
- in the cross-section, a maximum inclination angle of a profile of the cross-sectional shape to the predetermined direction is constant between the plurality of grooves arranged in the predetermined direction, and,
- when a direction orthogonal to the predetermined direction in the cross-section is a depth direction and the direction orthogonal to the cross-section is a linear direction,
- in each of the grooves, a depth of the groove and the maximum inclination angle are different in the linear direction.
Dependencies are inferred from the claim text.