Titania and sulfur co-doped quartz glass member and making method
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsShigeru Maida, Hisatoshi Otsuka
Life of this patent
Estimating the term…
Abstract
A titania and sulfur co-doped quartz glass member is provided. Due to co-doping of titania and sulfur, the quartz glass member undergoes zero expansion at a certain temperature and low thermal expansion over a wide temperature range, and is thus suited for use in a commercial EUV lithography tool. A manufacturing method and an optical member for EUV lithography are also provided.
Claims11
A method for manufacturing a titania-doped quartz glass member, comprising the steps of subjecting a feed of a silicon source gas and a titanium source gas to flame hydrolysis with the aid of a combustible gas and a combustion-supporting gas, to form synthetic silica fine particles, depositing the silica fine particles on a rotating target, and concurrently melting and vitrifying the particles to form titania-doped quartz glass,
- the feed further comprising a sulfur source gas whereby the resultant quartz glass is co-doped with titania and sulfur.
Dependencies are inferred from the claim text.