Flare map calculating method and recording medium

A flare map calculating method comprising:

• dividing, by using a computer, a pattern region having a plurality of patterns to set a plurality of division regions in the pattern region;
• performing, by using a computer, a first exposure simulation in each of the division regions to calculate an optical image intensity distribution in each of the division regions;
• calculating, by using a computer, an average value of the optical image intensity distribution of the division regions as an average value of optical intensity distribution in each of the division regions;
• retaining, by using a computer, correspondence information in which information indicating the average value of the optical intensity distribution is matched with each of the division regions which are two-dimensionally arrayed, as distribution information of an average value of optical intensity distribution within the pattern region;
• and
• calculating, by using a computer, a flare map representing a flare intensity distribution within the pattern region by convolution integral of the distribution information and a point spread function.

A non-transitory computer readable recording medium storing a flare map calculating program calculating a flare map on a computer, the flare map calculating program causing the computer to execute:

• dividing a pattern region having a plurality of patterns to set a plurality of division regions in the pattern region;
• performing an exposure simulation in each of the division regions to calculate an optical image intensity distribution in each of the division regions;
• calculating an average value of the optical image intensity distribution of the division regions as an average value of optical intensity distribution in each of the division regions;
• generating a pattern or plural patterns, which has a pattern density corresponding to the average value of the optical intensity distribution, as a corresponding density pattern in each of the division regions;
• generating a density map representing a pattern density within the pattern region based on the corresponding density pattern;
• and
• calculating the flare map of the pattern region by convolution integral of the density map and a point spread function.