Test terminal and setup system including the same of substrate processing apparatus

A setup system comprising:

• a substrate processing apparatus including:
• a plurality of process chambers configured to process substrates;
• a plurality of process chamber control units configured to individually control operations of the plurality of process chambers;
• a comprehensive control unit configured to comprehensively control the operations of the plurality of process chambers through the plurality of process chamber control units;
• a first operation unit configured to receive operation reports from the plurality of process chamber control units through the comprehensive control unit;
• a test terminal executing a test terminal program, the test terminal being connected to the plurality of process chamber control units with the comprehensive control unit and the first operation unit being disconnected from the plurality of process chamber control units, the test terminal comprising a pseudo comprehensive control unit configured to comprehensively control the operations of the plurality of process chambers through the process chamber control units;
• and
• a second operation unit configured to receive process chamber test operation reports from the process chamber control units through the pseudo comprehensive control unit,
• wherein the second operation unit transmits a process chamber test operation command to the plurality of process chamber control units through the pseudo comprehensive control unit, and receives through the pseudo comprehensive control unit the process chamber test operation reports obtained by individually testing the operations of the plurality of process chambers by the plurality of process chamber control units according to the process chamber test operation command received from the pseudo comprehensive control unit.

A setup system comprising:

• a substrate processing apparatus including:
• a plurality of process chambers configured to process substrates;
• a plurality of process chamber control units configured to individually control operations of the plurality of process chambers;
• a comprehensive control unit configured to comprehensively control the operations of the plurality of process chambers through the plurality of process chamber control units;
• a first operation unit configured to receive operation reports from the plurality of process chamber control units through the comprehensive control unit;
• and
• a test terminal comprising a pseudo comprehensive control unit configured to comprehensively control the operations of the plurality of process chambers through the process chamber control units;
• and a second operation unit configured to receive process chamber test operation reports from the process chamber control units through the pseudo comprehensive control unit,
• wherein the test terminal is connected to the plurality of process chamber control units with the comprehensive control unit and the first operation unit being disconnected from the plurality of process chamber control units, and
• wherein the second operation unit transmits a process chamber test operation command to the plurality of process chamber control units through the pseudo comprehensive control unit, and receives through the pseudo comprehensive control unit the process chamber test operation reports obtained by individually testing the operations of the plurality of process chambers by the plurality of process chamber control units according to the process chamber test operation command received from the pseudo comprehensive control unit.