Electrically programmable reticle and system
AssigneeAdvanced Micro Devices, Inc.
InventorKeith Randolph Miller
Life of this patent
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Abstract
An electrically programmable reticle is made using at least one electrochromatic layer that changes its optical transmissibility in response to applied voltages. Transparent conductor layers are configured to the desired patterns. The electrically programmable reticles are either patterned in continuous forms that have separately applied voltages or in a matrix of rows and columns that are addressed by row and column selects such that desired patterns are formed with the application of a first voltage level and reset with the application of a second voltage level.
Claims22
A reticle, comprising:
- an electrochromatic layer having a first portion;
- wherein the first portion is configured to transition to a translucent state in response to receiving a first voltage;
- and
- wherein the first portion is configured to transition to an opaque state in response to receiving a second voltage;
- wherein the electrochromatic layer is formed by a material having a property such that the first portion remains in the translucent state following removal of the first voltage and remains in the opaque state following removal of the second voltage.
A method, comprising:
- applying a first voltage to an electrochromatic layer of a reticle, wherein applying the first voltage causes a first portion of the electrochromatic layer to transition to a translucent state;
- applying a second voltage to the electrochromatic layer, wherein applying the second voltage causes the first portion to transition to an opaque state;
- and
- directing a beam of a light source through the reticle onto a surface, wherein the surface is a wafer, and wherein the method is usable to manufacture a semiconductor device.
An apparatus, comprising:
- a light source;
- a reticle, configured to receive light transmitted by the light source before the light reaches a wafer, wherein the reticle includes an electrochromatic layer having a first portion;
- wherein the first portion is configured to transition to a translucent state in response to receiving a first signal;
- and
- wherein the first portion is configured to transition to an opaque state in response to receiving a second signal.
Dependencies are inferred from the claim text.