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US 8,525,277 B2Granted
MEMS device
AssigneeSeiko Epson Corporation
InventorShogo Inaba
Life of this patent
Estimating the term…
Abstract
A MEMS device includes a substrate, an insulating layer section formed above the substrate and having a cavity, a functional element contained in the cavity, and a fuse element contained in the cavity and electrically connected with the functional element. It is preferable that the fuse element is spaced apart from the substrate.
Claims11
A MEMS device comprising:
- a substrate;
- an insulating layer section formed above the substrate and having a cavity having a top, a bottom and sides;
- a wall section contained in the cavity;
- a functional element contained in the cavity;
- and
- a fuse element contained in the cavity and electrically connected with the functional element, wherein
- the wall section is formed from the bottom of the cavity between the functional element and the fuse element, and
- a wall height of the wall section is larger than a fuse height of the fuse element.
5 more elements
A MEMS device comprising:
- a substrate;
- a first insulating layer on the substrate;
- a functional element formed on the first insulating layer;
- a fuse element formed on the first insulating layer and electrically connected with the functional element;
- a wall section formed on the first insulating layer, between the functional element and the fuse element in plan view;
- an insulating layer section surrounding in plan view the functional element, the fuse element, and the wall section;
- and
- a covering section formed in connection with the insulating layer section above the functional element, the fuse element, and the wall section, wherein
- the functional element includes a fixed electrode formed on the first insulating layer and a movable electrode formed spaced apart from the fixed electrode,
- the fuse element is supported by an interconnect plug formed on the first insulating layer, so that at least a portion of the fuse element is spaced apart from the first insulating layer, and
- the position of an upper surface of the wall section in a height direction from the first insulating layer is higher than any of the position of an uppermost portion of the functional element in the height direction from the first insulating layer and the position of an upper surface of the fuse element in the height direction from the first insulating layer.
8 more elements
Dependencies are inferred from the claim text.