Semiconductor storage device and method of manufacturing the same
AssigneeKabushiki Kaisha Toshiba
InventorsYoshiko Kato, Hiroyuki Kutsukake, Kikuko Sugimae, Yasuhiko Matsunaga
Life of this patent
Estimating the term…
Loading patent…
AssigneeKabushiki Kaisha Toshiba
InventorsYoshiko Kato, Hiroyuki Kutsukake, Kikuko Sugimae, Yasuhiko Matsunaga
Estimating the term…
A non-volatile semiconductor storage device includes: a semiconductor substrate; a semiconductor layer formed on the semiconductor substrate; a first device isolation/insulation film formed in a trench, the trench formed in the semiconductor layer, with a first direction taken as a longitudinal direction; a device formation region formed by separating the semiconductor layer by the first device isolation/insulation film with the first direction taken as a longitudinal direction; and a memory transistor disposed on the device formation region. The first device isolation/insulation film and the device formation region have an impurity of a first conductivity type. An impurity concentration of the impurity of the first conductivity type in the first device isolation/insulation film is higher than that in the device formation region.
A semiconductor storage device comprising:
Dependencies are inferred from the claim text.