Photoresist composition
AssigneeSumitomo Chemical Company, Limited
InventorsYuko Yamashita, Nobuo Ando
Life of this patent
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Abstract
The present invention provides a photoresist composition comprising a resin which comprises a structural unit represented by the formula (I): wherein Q1 and Q2 independently represent a fluorine atom etc., U represents a C1-C20 divalent hydrocarbon group etc., X1 represents —O—CO— etc., and A+ represents an organic counter ion, and a compound represented by the formula (D′): wherein R51, R52, R53 and R54 independently represent a C1-C20 alkyl group etc., and A11 represents a C1-C36 saturated cyclic hydrocarbon group which may have one or more substituents and which may contain one or more heteroatoms.
Claims10
A photoresist composition comprising a resin which comprises a structural unit represented by the formula (I):
- wherein Q1 and Q2 independently represent a fluorine atom or a C1-C6 perfluoroalkyl group, U represents a C1-C20 divalent hydrocarbon group in which one or more —CH2— may be replaced by —O—, —NH—, —S—, —NRc—, —CO— or —CO—O—, Rc represents a C1-C6 alkyl group, X1 represents —O—CO—, —CO—O—, —CO—O—CH2—, —CH2—O—CO—, —O—CH2—, —CH2—O—, —NRd—CO— or —CO—NRd—, Rd represents a hydrogen atom or a C1-C6 alkyl group, and A+ represents an organic counter ion, and a compound represented by the formula (D):
- wherein R1, R2, R3 and R4 independently represent a C1-C8 alkyl group, and A1 represents a C3-C36 divalent saturated cyclic hydrocarbon group which can contain one or more heteroatoms and which have one or more substituents or a C6-C20 divalent aromatic hydrocarbon group which can contain one or more heteroatoms and which have one or more substituents.
Dependencies are inferred from the claim text.