Electrostatic clamp optimizer
AssigneeTrek, Inc.
InventorsPeter McAnn, Toshio Uehara
Life of this patent
Estimating the term…
Abstract
A system which may be used to control, monitor and optimize an electrostatic clamp is disclosed. In one embodiment of the invention, there is a computer, a control circuit, and at least one amplifier. Also, a signal assessing circuit may be included and used to provide a sensing signal to an output signal of the control circuit. The signal assessing circuit may provide a sensing signal that can be used to monitor the capacitance of the electrostatic clamp. Further, the signal assessing circuit may include circuitry which monitors performance of the electrostatic clamp, and provide performance information to the control circuit.
Claims15
A system for controlling an electrostatic clamp, comprising:
- a computer programmed to accept control information from a user, and provide digital commands corresponding to the control information;
- a control circuit having circuitry capable of accepting the digital commands, and providing an electrode control signal corresponding to the digital commands;
- a signal providing circuit for providing a sensing signal to the electrode control signal to produce a clamp signal;
- at least one amplifier, having an input port for receiving the clamp signal, and an output port for providing a high voltage control signal to at least one electrode of an electrostatic clamp;
- and
- a signal assessing circuit for monitoring performance of the electrostatic clamp by using the sensing signal.
A method of monitoring an electrostatic clamp, comprising:
- providing control information to a computer that is programmed to provide digital commands corresponding to the control information;
- creating the digital commands with the computer;
- receiving the digital commands at a control circuit having circuitry capable of accepting the digital commands, and providing an electrode control signal corresponding to the digital commands;
- creating the electrode control signal with the control circuit;
- providing a sensing signal and combining the sensing signal with the electrode control signal to produce a clamp signal;
- receiving the clamp signal at an amplifier;
- amplifying the clamp signal with the amplifier and providing a high voltage control signal to an electrode of an electrostatic clamp;
- monitoring operation of the electrostatic clamp by using the sensing signal;
- and
- providing monitoring information corresponding to the operation of the amplifier.
Dependencies are inferred from the claim text.