Apparatus and method for moving a substrate

A plurality of substrate holders for holding substrates each of said substrate holders comprising:

• a frame having an upper rim and an inner periphery, said inner periphery defining a first opening for receiving a respective substrate,
• a shoulder projecting laterally inward from the inner periphery of the frame for supporting the substrate in the first frame opening,
• said shoulder having an inner periphery defining a second opening smaller than the first opening for receiving a substrate support whereby the holder and a substrate therein may be moved by an automated transport device to a position above the substrate support and then lowered to a position in which said shoulder of the holder is positioned below a top surface of the substrate support and the substrate is deposited on the top surface of the substrate support,
• wherein said substrate holders are configured for stacking one on top of another while maintaining a spacing between the frames of adjacent substrate holders;
• feet extending below the frame of each substrate holder of said plurality of substrate holders for maintaining said spacing;
• and
• recesses in the upper rim of the frame of a first substrate holder of said plurality of substrate holders for receiving respective feet of a second substrate holder of said plurality of substrate holders stacked on the first substrate holder.