Back to results
US 8,509,938 B2Granted
Substrate apparatus calibration and synchronization procedure
AssigneeBrooks Automation, Inc.
InventorAlexander G. Krupyshev
Life of this patent
Estimating the term…
Abstract
A method for positioning substrates in a substrate processing apparatus having a substrate alignment device, a first substrate transport apparatus and a second substrate transport apparatus, includes calibrating the substrate alignment device with a motion of the first substrate transport apparatus, and calibrating a coordinate system of the second substrate transport apparatus with the substrate alignment device.
Claims17
A substrate processing apparatus comprising:
- a frame;
- a substrate alignment device connected to the frame;
- at least one substrate transport apparatus movably connected to the frame;
- at least one substrate station accessible by the at least one substrate transport apparatus;
- and
- a control system configured to calibrate the substrate alignment device with a motion of the at least one substrate transport apparatus and to calibrate a coordinate system of the at least one substrate station with the substrate alignment device.
3 more elements
A substrate processing apparatus comprising:
- a frame;
- a substrate alignment device connected to the frame;
- at least one substrate transport apparatus movably connected to the frame and having a coordinate system;
- at least one substrate station accessible by the at least one substrate transport apparatus;
- and
- a control system configured to generate calibrated spatial coordinates identifying a location of the at least one substrate station based on a measured spatial relationship obtained by the aligner and an uncalibrated spatial coordinate within the coordinate system identifying a location of the at least one substrate station.
3 more elements
A substrate processing apparatus comprising:
- at least one substrate transport apparatus;
- a substrate alignment device accessible by one of the at least one substrate transport apparatus;
- and
- a control system connected to the at least one substrate transport apparatus and the substrate alignment device and configured to calibrate the substrate alignment device with a motion of the one of the at least one substrate transport apparatus and to calibrate a coordinate system of another of the at least one substrate transport apparatus with the substrate alignment device wherein the substrate alignment device is inaccessible by the other of the at least one substrate transport apparatus.
1 more element
Dependencies are inferred from the claim text.