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US 8,507,306 B2Granted
Reduced stiction MEMS device with exposed silicon carbide
AssigneeAnalog Devices, Inc.
InventorsLi Chen, Christine H. Tsau, Thomas Kieran Nunan, Kuang L. Yang
Life of this patent
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Abstract
A MEMS device has a first member that is movable relative to a second member. At least one of the first member and the second member has exposed silicon carbide with a water contact angle of greater than about 70 degrees.
Claims19
A MEMS device comprising:
- a first member comprising a backplate;
- and
- a second member comprising a flexible diaphragm, the first member being movable relative to the second member such that the diaphragm and backplate form a microphone,
- at least one of the first member and the second member comprising exposed silicon carbide having a water contact angle of greater than about 70 degrees.
1 more element
A MEMS device comprising:
- a first member comprising polysilicon;
- and
- a second member, the first member being movable relative to the second member,
- the first member further comprising exposed silicon carbide having a water contact angle of greater than about 70 degrees.
1 more element
A MEMS device comprising:
- a first member comprising single crystal silicon;
- and
- a second member, the first member being movable relative to the second member,
- the first member further comprising exposed silicon carbide having a water contact angle of greater than about 70 degrees.
1 more element
A MEMS device comprising
- a first member comprising a base layer of single crystal silicon and a thinner layer of exposed silicon carbide;
- and
- a second member, the first member being movable relative to the second member,
- the exposed silicon carbide having a water contact angle of greater than about 70 degrees.
1 more element
Dependencies are inferred from the claim text.