Conveying device and vacuum apparatus
AssigneeUlvac, Inc.
InventorHirofumi Minami
Life of this patent
Estimating the term…
Abstract
The present invention provides a technology for holding an object to be reliably conveyed for the sake of high speed conveyance not only in a low temperature environment but also in a high temperature environment, and for reducing dust while conveying the object to be conveyed. A conveying device includes a link mechanism, which can expand and contract, has a plurality of arms to which power from a drive source is transmitted, and a mounting section which is connected to an operating tip section of the link mechanism through a drive link section and on which a substrate is mounted. The mounting section has latch sections for making contact with and latching side portions of the substrate.
Claims8
A conveying device, comprising:
- a link mechanism, which can expand and contract, having a plurality of arms to which power from a drive source is transmitted;
- and
- a mounting section connected to an operating tip section of the link mechanism through a drive link section and on which an object to be conveyed is mounted,
- wherein the mounting section has a latch section for making contact with and latching a side portion of the object to be conveyed,
- wherein the drive link section of the link mechanism is provided with cam mechanism-based pressing means, and
- wherein the pressing means includes cam drive surfaces formed on a pair of the adjacent drive link section of the link mechanism, respectively, and a pair of follower rollers being in contact with and capable of following the cam drive surfaces, respectively, and a follower mechanism section has a body section guided by a guide member, a compression coil spring attached around the body section, and a protruding pin shape pressing section to be guided and moved along a direction toward the latch section of the mounting section by movement of the pair of follower rollers.
A vacuum apparatus, comprising:
- a vacuum chamber;
- a conveying device including a link mechanism, which can expand and contract, having a plurality of arms to which power from a drive source is transmitted;
- and
- a mounting section connected to an operating tip section of the link mechanism through a drive link section and on which an object to be conveyed is mounted,
- wherein the mounting section has a latch section for making contact with and latching a side portion of the object to be conveyed,
- wherein the drive link section of the link mechanism has a cam mechanism-based pressing means,
- wherein the pressing means includes cam drive surfaces formed on a pair of the adjacent drive link section of the link mechanism, respectively, and a pair of follower rollers being in contact with and capable of following the cam drive surfaces, respectively, and a follower mechanism section having a body section guided by a guide member, a compression coil spring attached around the body section, and a protruding pin shape pressing section to be guided and moved along a direction toward the latch section of the mounting section by movement of the pair of follower rollers, and
- wherein the mounting section of the conveying device is carried in and out of the vacuum chamber.
Dependencies are inferred from the claim text.