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US 8,505,389 B2Granted
Mask defect testing apparatus
AssigneeSamsung Display Co., Ltd.
InventorSi-Young Park
Life of this patent
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Abstract
A mask defect test apparatus, including a tension jig unit having a supporter on which a metal mask to be tested is located, a clamp part disposed at both sides of the supporter to fix opposite edges of the metal mask, and a tension part to apply a tension force to the metal mask fixed by the clamp part; and a test unit to test the metal mask fixed by the tension jig unit. A vertical distance between the metal mask located on the supporter and the test unit is less than or equal to a vertical distance between the tension jig unit and the test unit.
Claims10
A mask defect test apparatus, comprising:
- a tension jig unit including a supporter on which a metal mask to be tested is located, a clamp part disposed at both sides of the supporter to fix opposite edges of the metal mask, and a tension part to apply a tension force to the metal mask fixed by the clamp part;
- and
- a test unit to test the metal mask fixed by the tension jig unit, the test unit comprising a camera unit,
- wherein a shortest vertical distance between the metal mask located on the supporter and the camera unit is less than or equal to a shortest vertical distance between the tension jig unit and the camera unit.
1 more element
Dependencies are inferred from the claim text.