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US 8,477,283 B2Granted
Exposure apparatus and device manufacturing method
AssigneeNikon Corporation
InventorYasufumi Nishii
Life of this patent
Estimating the term…
Abstract
An exposure apparatus comprises a first member, which is arranged so as to oppose a surface of a substrate, and between which and the surface of the substrate a liquid immersion space is formed; and a second member, which traps liquid that is present at the surface of the substrate. A distance between the second member and the substrate is smaller than a distance between the first member and the substrate.
Claims42
An exposure apparatus that irradiates exposure light onto a substrate to expose the substrate, comprising:
- a first member, which is arranged so as to oppose a surface of the substrate, and between which and a surface of the substrate a liquid immersion space is formed;
- a second member, which traps liquid that is present at the surface of the substrate, a distance between the second member and the substrate being smaller than a distance between the first member and the substrate;
- and
- a support apparatus configured to support the second member so that the second member is mechanically separated from the first member, wherein
- the first member has a first liquid recovery port arranged so as to oppose the surface of the substrate,
- the second member is positioned at an outer side of the first liquid recovery port with respect to an optical path space of the exposure light, and
- the second member is configured to trap the liquid that is present on the substrate without there being complete recovery by the first liquid recovery port.
4 more elements
An exposure apparatus that irradiates exposure light onto a substrate to expose the substrate, comprising:
- a first member, which is arranged so as to oppose a surface of the substrate, and between which and a surface of the substrate a liquid immersion space is formed;
- a second member, which traps liquid that is present at the surface of the substrate, a distance between the second member and the substrate being smaller than a distance between the first member and the substrate;
- and
- a support apparatus configured to support the second member so that the second member is mechanically separated from the first member, wherein
- the support apparatus movably supports the second member with respect to the surface of the substrate,
- the first member has a first liquid recovery sort arranged so as to oppose the surface of the substrate, and
- the second member is configured to trap the liquid that is present on the substrate without there being complete recover by the first liquid recovery port.
4 more elements
Dependencies are inferred from the claim text.