FOUP and robotic flange thereof
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Pao-Yi Lu, Kuo Chun Hung
Life of this patent
Estimating the term…
Loading patent…
AssigneeGudeng Precision Industrial Co., Ltd.
InventorsMing-Chien Chiu, Pao-Yi Lu, Kuo Chun Hung
Estimating the term…
A wafer container includes a container body, which comprises a plurality of sidewalls, a bottom, and a top to define a space for containing wafers, an opening being formed on one sidewall, and a door with an outer surface and an inner surface. The top of the container body is disposed with a robotic flange which comprises a foolproof structure and a hemi-circular snap-hook portion that are disposed at the center and its circumference of a lower surface of the robotic flange facing the top. The foolproof structure has a geometric hole for a protruding portion on the top of the container body to be plugged in. After the protruding portion is plugged into the geometric hole, the robotic flange is further rotated along the container body about 180 degrees for the hemi-circular snap-hook portion to be engaged in a hemi-circular supporting portion on the top of the container body.
A Front Opening Unified Pod, comprising a container body having a plurality of sidewalls, a bottom, and a top to form a space for accommodating wafers, an opening being formed on one sidewall of said container body for importing and exporting wafers, and a door having an outer surface and an inner surface, said door being connected to said container body via said inner surface, the characteristic of said wafer container in that:
Dependencies are inferred from the claim text.