Underlayer coating composition and processes thereof
AssigneeAZ Electronic Materials USA Corp.
InventorsHuirong Yao, Zachary Bogusz, Guanyang Lin, Mark Neisser
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Abstract
The invention relates to an underlayer coating composition comprising a polymer, where the polymer comprises at least one hydroxyaromatic unit in the backbone of the polymer phenol which has a pendant group comprising a fluoro or iodo moiety, and at least one unit comprising an aminoplast. The invention further relates to a process for forming an image using the composition, especially for EUV.
Claims20
An underlayer coating composition comprising a polymer, where the polymer comprises at least one hydroxyaromatic unit in the backbone of the polymer comprising a fluoro or iodo moiety, and at least one unit comprising an aminoplast, further where the hydroxyaromatic unit with the fluoro moiety has structure (1),
- where, R1 is fluoro moiety, R2 is fluoro moiety and R3 is selected from a group consisting of an iodo moiety, a fluoro moiety, hydrogen, hydroxyl, (C1-C4)alkyl, hydroxy(C1-C4)alkyl, OC1-C4alkyl, (C═O)(C1-C4)alkyl, C1-C4alkylO(C1-C4)alkyl, C1-C4alkyl(C═O)(C1-C4)alkyl and C(O)O(C1-C4)alkyl.
Dependencies are inferred from the claim text.