Method of processing graphene sheet material and method of manufacturing electronic device
AssigneeFujtsu Limited
InventorKoji Asano
Life of this patent
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Abstract
A method of processing a graphene sheet material includes irradiating UV ray to a graphene sheet material in an atmosphere containing a first substance to inactivate an edge of the graphene sheet material by substituting an end group connected to the edge of the graphene sheet material with more stable functional group generated from the first substance, and irradiating UV ray to a surface of the graphene sheet material in an atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
Claims18
A method of processing a graphene sheet material comprising:
- irradiating UV ray to a graphene sheet material in a first atmosphere containing a first substance to activate the first substance and inactivate an edge of the graphene sheet material by the activated first substance;
- and
- irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
A method of manufacturing an electronic device comprising:
- irradiating UV ray to a graphene sheet material in a first atmosphere containing a first substance to activate the first substance and inactivate an edge of the graphene sheet material by the activated first substance;
- and
- irradiating UV ray to a surface of the graphene sheet material in a second atmosphere containing a second substance containing oxygen to activate the second substance, and oxidize and remove a graphene sheet contained in the graphene sheet material sequentially from a surface side.
Dependencies are inferred from the claim text.