Method of manufacturing polymer nanopillars by anodic aluminum oxide membrane and imprint process

A method for forming polymer nanopillars comprising the steps of:

• providing a first substrate, said first substrate having been cleaned to remove organic residue;
• applying a water soluble tape over said first substrate to restrict a coating, area;
• performing a spin-coating with a polymer solution onto said first substrate in said restricted coating area;
• prebaking said spin coated first substrate at a predetermined temperature below a glass transition temperature of said polymer coating for removing a solvent in said polymer coating;
• positioning an anodic aluminum oxide membrane on top of said first substrate in the area of said polymer coating;
• turning over said first substrate with said anodic aluminum oxide membrane onto a second substrate forming an AAO anodic aluminum oxide assembly;
• placing said anodic aluminum oxide assembly in a nanoimprintor at a predetermined glass transition temperature of said polymer coating and a predetermined pressure;
• removing said anodic aluminum oxide assembly from said nanoimprintor and disassembling said anodic aluminum oxide assembly;
• dissolving said anodic aluminum oxide membrane in a NaOH solution leaving said nanopillars formed on said first substrate.