Quartz sensor and sensing device
AssigneeNihon Dempa Kogyo Co., Ltd.
InventorMitsuaki Koyama
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AssigneeNihon Dempa Kogyo Co., Ltd.
InventorMitsuaki Koyama
Estimating the term…
To provide a quartz sensor capable of detecting a sensing target with high sensitivity also in measurement in a liquid phase in which a difference in Q values at the time of measurement in the liquid phase and in a vapor phase is small. In a quartz sensor 1 including an AT-cut quartz plate 11 having a capture layer (absorbing layer) 12 formed on one surface (XZ′ surface) thereof and detecting a sensing target based on an amount of change in a frequency of a quartz resonator 10 caused when the sensing target is absorbed by the capture layer 12, there are formed electrodes 13 for oscillating the quartz plate 11 on end faces (XY′ surfaces) mutually opposite in a Z′ direction of the surface of the quartz resonator 10 on which the capture layer 12 is formed (XZ′ surface).
A quartz sensor having a capture layer for capturing a sensing target in sample solution formed on a plate surface of an AT-cut quartz plate thereof and sensing the sensing target based on a change in a natural frequency of the quartz plate caused when the sensing target is captured by the capture layer, said quartz sensor comprising electrodes which are provided on end faces that are mutually opposite in a Z′ direction of the quartz plate, and which are for causing a parallel electric field excitation in the quartz plate, wherein an entirety of both faces of the quartz plate are flat.
A quartz sensor having a capture layer for capturing a sensing target in sample solution formed on a plate surface of an AT-cut quartz plate thereof and sensing the sensing target based on a change in a natural frequency of the quartz plate caused when the sensing target is captured by the capture layer, said quartz sensor comprising electrodes for vibrating the quartz plate provided on mutually opposite end faces of the quartz plate, wherein a metal layer insulated from said electrodes is formed on the plate surface of the quartz plate, and the capture layer is formed on the metal layer.
A quartz sensor having a capture layer for capturing a sensing target in sample solution formed on a plate surface of an AT-cut quartz plate thereof and sensing the sensing target based on a change in a natural frequency of the quartz plate caused when the sensing target is captured by the capture layer, said quartz sensor comprising electrodes for vibrating the quartz plate provided on mutually opposite end faces of the quartz plate, wherein when said electrodes provided on the end faces of the quartz plate are set as first electrodes, there are mutually opposite second electrodes each provided on a part of each of both plate surfaces of the quartz plate, and said first electrodes and the second electrodes are electrically connected to one another.
A quartz sensor, comprising:
Dependencies are inferred from the claim text.