Systems and methods for determining resonant frequency and quality factor of overdamped systems

A method of calibrating a MEMS system, the method comprising:

• providing a MEMS device that is overdamped along at least one motion axis;
• determining a first location of a pole of the MEMS device along the at least one motion axis;
• changing the first location to a second location;
• determining the second location of the pole;
• calculating a resonant frequency, a quality factor, or both using the first and the second location of the pole;
• and
• calibrating the MEMS system based on the calculated resonant frequency, the calculated quality factor, or both.

A method of detecting a parameter with a MEMS system, the method comprising:

• providing a MEMS device that is overdamped along at least one motion axis;
• determining a first location of a pole of the MEMS device along the at least one motion axis;
• measuring a change in the first location to a second location of the pole;
• calculating a resonant frequency, a quality factor, or both using the first and the second location of the pole;
• and
• determining the parameter based on the calculated resonant frequency, the calculated quality factor, or both.