Back to results
US 8,464,419 B2Granted
Methods of and factories for thin-film battery manufacturing
AssigneeApplied Materials, Inc.
InventorsByung-Sung Kwak, Stefan Bangert, Dieter Haas, Omkaram Nalamasu
Life of this patent
Estimating the term…
Abstract
Methods of and factories for thin-film battery manufacturing are described. A method includes operations for fabricating a thin-film battery. A factory includes one or more tool sets for fabricating a thin-film battery.
Claims19
A factory layout for lithium-based thin-film battery manufacturing, the factory layout comprising:
- a first process tool for depositing metal or semiconductor layers;
- a second process tool for depositing active layers, the second process tool comprising:
- a first cluster tool for deposition of cathode layers;
- a second cluster tool for deposition of electrolyte layers;
- and
- a lithium evaporation tool comprising one or more gloveboxes coupling the lithium evaporation tool to the first cluster tool and to the second cluster tool;
- a third process tool for rapid thermal processing;
- a fourth process tool for depositing dielectric layers;
- a fifth process tool for performing reactive ion etching;
- and
- a sixth process tool for depositing specialty layers for thin-film batteries.
8 more elements
A factory layout for lithium-based thin-film battery manufacturing, the factory layout comprising:
- a first process tool for depositing metal or semiconductor layers;
- a second process tool for depositing active layers, the second process tool comprising:
- a first cluster tool for deposition of cathode layers;
- a second cluster tool for deposition of electrolyte layers;
- and
- a lithium evaporation tool positioned between the first cluster tool and the second cluster tool, wherein a first of glovebox couples the first cluster tool to the lithium evaporation tool, and a second glovebox couples the first cluster tool to the lithium evaporation tool;
- a third process tool for rapid thermal processing;
- a fourth process tool for depositing dielectric layers;
- a fifth process tool for performing reactive ion etching;
- and
- a sixth process tool for depositing specialty layers for thin-film batteries.
8 more elements
A process tool for lithium-based thin-film battery manufacturing, the process tool comprising:
- a first cluster tool for deposition of cathode layers;
- a second cluster tool for deposition of electrolyte layers;
- and
- a lithium evaporation tool comprising one or more gloveboxes coupling the lithium evaporation tool to the first cluster tool and to the second cluster tool.
1 more element
Dependencies are inferred from the claim text.