Method and system for implementing controlled breaks between features using sub-resolution assist features
AssigneeCadence Design Systems, Inc.
InventorJason Sweis
Life of this patent
Estimating the term…
Abstract
Disclosed is a method, system, and computer program product for implementing controlled breaks using sub-resolution assist features. Sub-resolution bridging features are added to implement controlled breaks between features on the layout. The bridging features may also be used to facilitate or optimize multiple mask/exposure techniques that split a layout or features on a layout to address pitch problems.
Claims20
A computer implemented method for performing compaction for an electronic design, comprising:
- receiving an electronic design;
- identifying features within the electronic design that can be compacted to smaller spacing distances;
- compacting at least two features of the features that are identified to reduce a spacing between the at least two features;
- and
- generating a bridging feature between the at least two features of the features that are compacted, in which
- the bridging feature is structured so that a controlled break will occur at the bridging feature during lithographic printing.
A computer program product comprising a non-transitory computer readable storage medium storing thereupon a sequence of instructions which, when executed by at least one processor of a computing system, causes the at least one processor to execute a method for performing compaction for an electronic design, the method comprising:
- using the at least one processor to perform a process, the process comprising:
- receiving an electronic design;
- identifying features within the electronic design that can be compacted to smaller spacing distances;
- compacting at least two features of the features that are identified to reduce a spacing between the at least two features;
- and
- generating a bridging feature between the at least two features of the features that are compacted, in which the bridging feature is structured so that a controlled break will occur at the bridging feature during lithographic printing.
A system for performing compaction for an electronic design, comprising:
- at least one processor that is to:
- receive an electronic design;
- identify features within the electronic design that can be compacted to smaller spacing distances;
- compact at least two features of the features that are identified to reduce a spacing between the at least two features;
- and
- generate a bridging feature between the at least two features of the features that are compacted, in which
- the bridging feature is structured so that a controlled break will occur at the bridging feature during lithographic printing.
Dependencies are inferred from the claim text.