Power distribution network

An integrated circuit (IC), comprising

• a first set of power distribution lines;
• a second set of power distribution lines;
• a plurality of capacitors;
• and
• a plurality of sets of vias, each set of vias having:
• one or more vias coupling a first end of a respective one of the plurality of capacitors to one or more of the first set of power distribution lines;
• one or more vias coupling a second end of the respective one of the plurality of capacitors to one or more of the second set of power distribution lines;
• and
• wherein each set in the plurality of sets of vias has a different number of vias.

A method of fabricating an integrated circuit, comprising:

• forming a first set of power distribution lines in a semiconductor substrate;
• forming a second set of power distribution lines in the semiconductor substrate;
• forming a first capacitor in the semiconductor substrate;
• forming a second capacitor in the semiconductor substrate;
• and
• forming a first plurality of vias coupling a first input of the first and second capacitors to the first set of power distribution lines, and
• forming a second plurality of vias coupling a second input of the first and second capacitors to the second set of power distribution lines,
• the first capacitor and the first plurality of vias and the second plurality of vias coupled thereto having an equivalent series resistance greater than an equivalent series resistance of the second capacitor and the first plurality of vias and the second plurality of vias coupled thereto.